The RPS Cleaning Kit, designed for the *AMAT Producer® SE, significantly enhances cleaning efficiency. It focuses on reducing particles in the Remote Plasma Source (RPS) unit using specialized products, the HT4500-RPS23L kit, includes a MiraSWAB® with Flexible Tip Swab, Linear MiraWIPE® with sponge, and MiraWIPE® with string. These tools are crafted for easy access and effective cleaning of challenging areas like the RPS edge and ignitor.

RPS PM Kit:

1. 13.8",Flexible Tip - 1 pc

2. MiraWIPE w/String, Laser Sealed Edges - 1 pc

3. Linear Mira Sponge Cleaner - 1 pc