Muto
五九集英代理销售美国Muto Technology 之PVC, ETCH 等半导体相关耗材产品，致力于提供客户最佳品质、具竞争力价格的产品以协助客户达到节省成本、改良改善的效益。 已供应全球超过130 Fabs，为提供零件与服务的领先供应商。
| OEM PN | Part Description |
|---|---|
| 0020-63124 | 300mm Cover Ring with Arc Spray |
| 0020-27819 | 200mm Cover Ring |
| 0240-20021 | DC Bias/Clamp Ring Support Kit |
| 0021-11747 | 200mm A101 Pedestal with Flat and Ears |
| 0021-20106 | 200mm A101 Pedestal with Flat |
| 0020-28937 | 200mm A101 Pedestal with Flat |
| 0020-26588 | 200mm=8" Preclean Shield |
| 0200-02863 | DEP RING, 300MM SIP ENCORE TAN, CLEANCOAT |
| 0020-24236 | Antenna Spring Clip |
| 0021-54083 | Antenna Dowel |
| 0020-22844 | 200mm=8" Preclean Pedestal Shield |
| 0020-24531 | Adapter Shield |
| 0020-27190 | 200mm Upper Shield |
| 0021-20114 | 200mm Upper Shield |
| 0200-02677 | 12" Deposition Ring |
| 0040-86514 | 300mm Lower Preclean Shield |
| 0200-01903 | 300mm Insulator |
| 0020-02348 | 300mm Sip Lower Shield Clamp |
| 0020-45231 | 300mm Shutter with Arc Spray |
| 0020-29711 | 300mm Lower Shield |
| 0021-22177 | 300mm Cover Ring |
| 0021-24752 | 300mm Upper Shield |
| 0020-24164 | 300mm Lower Shield with Side Holes Arc Spray |
| 0020-28033 | 300mm Upper Shield with Arc Spray |
| 0020-24166 | 300mm Cover Ring with Arc Spray |
| 0040-51718 | 300mm Deposition Ring with Arc Spray |
| 0020-29206 | IMP Coil Support Bushing |
| 0020-29306 | IMP Feedthru Coil Support Outercup |
| 0020-29143 | IMP Coil Outer Cup Support |
| 0021-22589 | Captive Screw, IMP |
| 3690-03177 | 8-32 x 1-1/4" SS SHCS, Silver Plated |
| 3690-03970 | 8-32 x 1-1/8" SS SHCS, Silver Plated |
| 0200-20169 | IMP Insulator Coil Support |
| 0200-20439 | IMP Insulator Coil Support |
| 0200-20175 | IMP Labyrinth Rigid Coil Support |
| 0200-20217 | IMP Labyrinth Feedthru |
| 0200-20215 | Housing, Double RF Connectors, Vectra |
| 0200-20170 | IMP Coil Support Cap |
| 0020-29975 | Bar RF Connector. 12 Copper |
| 0020-29974 | Clamp Feedthru Coil Copper, Silver Plated |
| 0021-22587 | Nut, RF Connector 10-32, IMP |
| 0200-01798 | Lift Pin |
| 0020-29344 | 200mm IMP Vectra Lower Shield |
| 0200-00299 | Insulator Coil support |
| 0200-36631 | Cover Plate, DXZ Patterned Heater |
| 0200-10284 | Lift Pin Ceramic |
| 0020-25920 | 200mm Lower Shield |
| 0020-23586 | Adapter Shield |
| 0020-28631 | 200mm Clamp Ring |
| 0020-22510 | 200mm Clamp Ring |
| 0020-20113 | DC Bias Assembly Hub |
| 0020-23041 | Clamp Shield |
| 0020-27113 | 6' SMF calmp ring |
| 0020-21462 | Insulator Ceramic |
| 0020-25744 | shiled low 6 " g-12 101sst |
| 0020-28420 | PEDESTAL,6”AVD 101%, MAT:TI,HI-PWR |
| 0020-28206 | SHIELD, UPPER, 8” HI-PWR TTN, SCREWLESS |
| 0020-28205 | COVER RING |
| 0020-46072 | COVER RING |
| 0020-48628 | 300mm Edge Ring |
| 0020-30678 | 150mm Clamp Ring |
| 0021-07905 | 200mm SIP Lower Shield (CU Chamber) |
| 0020-23044 | 200mm Lower Shield |
| 0020-23042 | source adapter |
| 0020-21665 | Shield |
| 0020-26823 | 150mm HTHU Lower Shield |
| 0020-25059 | CLAMP RING 6" AL SMF STRAIGHT FLAT |
| 0020-26474 | CLAMP RING 6 SMF AL FOUR PAD |
| 0020-21468 | CLAMP SHIELD 5 & 6" |
| 3690-02569 | SCR MACH FLT HD 6-32 X 1/2L SLOT TITAN |
| 0020-21463 | SHIELD AL/TI 6" |
| 0020-24959 | SHIELD AL/TI 6" |
| 0015-20035 | SCREW, INSULATOR |
| 3690-02848 | SCR CAP FLT HD 6-32X1/4L SLOT 82DEG SST SLVR-PLT |
| 3690-01869 | SCR CAP SKT HD 4-40X1/4L HEX SKT SST SLVR-PLT |
| 0020-29409 | CONDUCTOR, FLEX DC BIAS |
| 0020-20117 | DC Bias Conducting Flex |
| 0020-20119 | PAD DC BIAS |
| 0020-21366 | SCREW SHOULDER DC BIAS TIW |
| 0020-20114 | ISOLATOR, DC BIAS |
| 0020-20126 | STAND-OFF, CERAMIC DC BIAS |
| 3630-01091 | RTNRRING EXT 3/4 SFT .062THKSST |
| 3630-01092 | RTNR RING INT 5/8 HSG .035THKSST |
| 3880-01022 | WSHRLKG SPLIT#4 .203OD X .120ID X .025THKSST |
| 3880-01004 | WSHRFLAT #4 SST .031 THK |
| 0020-26971 | 6" TI SHUTTER DISK |
| 0020-28392 | DISK 6" ADV 101 SHUTTER |
| 0020-22846 | GAS TRENCH COVER |
| 0200-20060 | INSULATE |
| 0200-20058 | INSULATOR QTZ 6" JMF A PCII |
| 0020-28938 | PEDESTAL COVER 6" ADV 101 FULL COVERAGE |
| 0020-27122 | PEDESTAL,PCII 6" JMF/SMF@A OR PCII W/CRYO |
| 0020-26403 | RING COVER 6" HTESC ALUM |
| 0021-21900 | RING DEPOSTION 150mm= 6" JMF ,9MM ALUM HTESC |
| 0020-26310 | SHIELD LOWER 6" CLMPD SPPRT LESS DURA |
| 0020-24898 | SHIELD 6" SST 101 AL |
| 0020-26289 | SHIELD LOWER 6" 101 DURA TTN |
| 0020-22498 | Upper Shield |
| 0020-22499 | 200mm Lower Shield |
| 0020-26547 | 200mm Clamp Ring with Tabs |
| 0020-27702 | 200mm Clamp Ring, SNNF,3.4mm , 6 Pad |
| 0021-01317 | Outer Shield , TxZ 200MM 1 |
| 0200-20426 | Non-antenna insulator |
| 0200-02121 | 300mm RF feed thru insulator |
| 0020-23043 | SHILD TIN, UPPER 8 INCH WAFER |
| 0020-23045 | Lower Shield, 101% Tin Coverage |
| 0020-24386 | Cover Ring |
| 0020-24365 | Lower Shield |
| 0021-16781 | 300mm SIP Upper Shield |
| 0020-26374 | 300mm SIP Middle Shield Clamp |
| 0020-08299 | 300mm SIP Middle Shield Clamp |
| 0020-28207 | SHIELD,LOWER,HI-PWR POIS TTN,A101, |
| 0020-29015 | RING,CLAMP RING.8"SNNF,SST,LOW ROOF, |
| 0040-21528 | COLLIMATOR,FOIL 5/8"HEX 1:1,SHAPED |
| 0020-09716 | Lift pin, |
| 0021-15657 | SHUTTER DISC MDP 300MM |
| 0020-23278 | Upper shield |
| 0020-23277 | Lower shield |
| 0021-20089 | Upper Shield |
| 0021-20090 | Lower Shield |
| 0200-00406 | BUSHING, PREDESTAL RPC+ |
| 0020-26973 | 8” TI Shutter Disk |
| 0020-20112 | Ti Chamber Clamp Ring |
| 0020-24913 | 101 pedestal |
| 0020-25731 | Adapter Shiled |
| 0020-28346 | 200mm clamp ring |
| 0020-14847 | Lower shield |
| 0020-15016 | Upper shield |
| 0040-01549 | Pedestal |
| 0020-21900 | 200mm clamped lower shield (SS type) |
| 0020-24614 | SHIELD LOW KNEE AL/TI PRCS SST 6" WFR .2 |
| 0200-00624 | RING PURGE 200MM WXZ+ NCSR |
| 0020-22734 | Honeycomb collimator 1/2 hex |
| 0020-23584 | SHIELD UPPER 8" WAFER G-12 |
| 0020-27701 | 6" HTHU Clamp Ring |
| 0020-22920 | 150mm=6" Preclean shield |
| 0020-29348 | IMP Feedthru Coil Support Outercup |
| 0021-04229 | 8-32 X 1-1/8" Nitronic 60 Hex Socket Head Screw |
| 0021-04230 | 8-32 X 1-1/4" Nitronic 60 Hex Socket Head Screw |
| 3690-02977 | 6-32 x 5/16" SS SHCS, Silver Plated |
| 3880-01166 | #6 SS Flat Washer (.24" OD,.14" ID, .03" Thick) |
| 3700-01170 | 2-388 Black Viton Target O-Ring, 300mm |
| 0200-20315 | IMP Rest button (for B101 chamber type) |
| 0020-27869 | Pedestal 6" SMF |
| 0020-06270 | 200mm SIP Inner Shield withArc Spray |
| 0020-08673 | 200mm SIP Inner Shield withArc Spray |
| 0020-27124 | 150mm Preclean Pedestal |
| 0020-22909 | 150mm Preclean Pedestal Shield |
| 0020-29202 | Clamp ring SMF |
| 0240-11789 | KIT 101% REST BUTTONS TIN COATED |
| 0020-22292 | 6" Lower Shield, AL |
| 0020-22794 | Upper Shield SST |
| 0200-35486 | PIN LIFT MOD 2 |
| 0020-42285 | BLOCKER PLATE |
| 0020-27116 | SCREW |
| 0020-26394 | 200mm Lower Shield with Arc Spray |
| 0240-25480 | A101 Hardware Kit |
| 0020-29640 | A101 Pedestal Rest Button |
| 0020-26312 | Upper Shield |
| 0200-35611 | Screw Lid Liner TxZ |
| 0021-97309 | DISK, SHUTTER, ESC, CENTER PIN, AL ARC SPRAY, ENDURA 2, 300MM |
| 0020-02344 | 300mm SIP Lower Shield withArc Spray with Side Holes |
| 0020-23549 | 300mm SIP Upper Shield with Arc Spray |
| 0200-01389 | 300mm Deposition Ring |
| 0021-17770 | 300mm Cover Ring with ArcSpray |
| 0020-05810 | IMP Copper Ring |
| 0200-09450 | Gas Feed Tube |
| 0021-21234 | SHIELD, UPPER HI-COND TIN LONG, 300MM PVD |
| 0021-22064 | COVER RING, TTN, 300MM PVD |
| 0021-22065 | SHIELD, LOWER HI-COND TTN, 300MM PVD |
| 0040-07291 | DEPOSITION RING ADV 101 300MM |
| 0200-20492 | INSULATOR, RCPT, RIGID SUPPORT, VECTRA-IMP ICE |
| 0020-26216 | SHIELD 6″ SST AL ARC 101 LOW KNEE |
| 0240-20022 | Shield Clamp Kits |
| 0020-93157 | CIP Encore Cover Ring |
| 0020-21867 | RF Bars |
| 0020-27871 | Clamp Ring Screw |
| 0200-39140 | Cersmic Ring, Focus, 200mm SEMI NOTCH DPS METAL |
| 0020-23587 | SPACER MODIF SHIELD 8"G-12 |
| 0020-05389 | lift Pin |
| 0040-06127 | Shield Insert Inner, new |
| 0021-03980 | Outer shield w/o window |
| 0020-54777 | Inner shield with arc spray |
| 0020-02345 | Inner shield with blasted |
| 0200-22583 | Coil support Bushing |
| 0021-22583 | Coil support Bushing |
| 0200-02262 | Insulator coil support |
| 0200-02145 | Cap, EB coil support |
| 0200-23799 | 12" RF Bar (Ni Plated) |
| 0200-24423 | Retainer plate |
| 0040-04586 | SHIELD INNER, TXZ CVD 300MM |
| 0200-02421 | ISOLATOR, LID TOP CERAMIC, TXZ 300MM |
| 0200-01041 | 200mm cover ring Arc-spray (LP) (OEM-LP) |
| 0020-22852 | Shield 200mm |
| 3880-01836 | #8 Inconel Belleville Washer |
| 0020-26822 | 200mm Lower Shield HTHU |
| 0200-00590 | Bushing Upper Shield Upper Insu, SIP, Ceramic |
| 0200-36630 | 8" Cover Plate Heater, DXZ, Aluminum NIT |
| 0020-44974 | CUP, OUTER, .125 THK, EB COIL, 300MM SIP, CLEANCOAT |
| 0020-44976 | SHIELD, OUTER, 300MM, SIP ENCORE TA(N), CLEANCOAT /WITH OR NO ARC SPRAY |
| 0020-63125 | DEP RING, CLAMPED, CLEANCOAT, 300MM ESC |
| 0021-16782 | SHIELD, MIDDLE, 12.46 LG, SIP CU, 300MM |
| 0020-83706 | SHIELD, MIDDLE, 12.46 LG, SIP CU, 300MM |
| 0020-85755 | SHIELD, LOWER, NARROW NECK, SIP CU, 300MM |
| 0021-16287 | SHIELD, LOWER, NARROW NECK, SIP CU, 300MM |
| 0200-04017 | RING, DEPOSITION, NARROW OD, EXTENDED TRENCH, 300M |
| 0200-20285 | PEDESTAL COVER UPPER 8"B101 VECTRA-IMP CERAMIC |
| 0200-20331 | COVER RING 8" B101 CERAMIC, 10.75" OD |
| 0200-36105 | CERAMIC INSERT |
| 0021-22311 | SHIELD 13" SRC, 6" 101, SST |
| 0200-20494 | CAP, RIGID COIL SUPPORT, VECTRA-IMP ICE |
| 0021-17725 | SHUTTER DISK,SNNF ESC,200MM SIP TA(N),KACHINA 1100 RA TWAS,Ta PK,0021-17725 Ta |
| 0020-19708 | cover ring，200MM SIP TA(N),TI,KACHINA 1100 RA TWAS,Ta PK,0020-19708 Ta |
| 0021-23331 | SHIELD,OUTER,SIP II 200MM,Ta PK,0021-23331 Ta |
| 0021-23332 | SHIELD,UPPER,STRAIGHT,SIP II 200MM,Ta PK,0021-23332 Ta |
| 0021-23330 | SHIELD,INNER SBSEB3 SIP ENCORE TA(N),0021-23330 /200mm Encore Inner Shield |
| 0021-20572 | PEDESTAL,150mm=6" ADV.101 FULL CVRG (A101 pedestal) |
| 0021-02469 | TxZ pumping port-->Exhaust Liner Insert, TxZ |
| 0021-24811 | TxZ pumping port-->Exhaust Liner Insert, TxZ |
| 0020-24962 | SHIELD LOW KNEE AL/TI PRCS SST 200mm=8" WFR(screw hole side no b-blast) |
| 0020-22647 | Shield coherent upper 11.3'' (AL, arc spray) |
| 0020-08677 | Upper Gnd Shield |
| 0020-08674 | 200mm SIP Lower Shield with Arc Spray |
| 0020-25670 | Shield, 200MM SRC (shield is for 150mm wafers, clamped ring type lower shield) |
| 0020-23396 | Lower Shield, 200MM |
| 0200-20437 | Dep ring |
| 0200-02114 | Ceramic RF Housing |
| 0020-25077 | SHIELD LOWER 8" 101G-12 SST |
| 3690-01884 | Clamp Screw, Shield, Inner, 300mm SIP Encore TA(N) 10-24 x 1/2" SHCS - Silver Coated (TKM Screw) |
| 0020-24332 | SCR CAP SKT HD 8-32X7/8"L HEX SKT NITRON |
| 0020-23799 | BAR, RF SBS, 300MM SIP ENCORE TA(N) |
| 0020-22975 | Insulator TiN 8" wafer = 200mm sourcing ring |
| 0020-22982 | G12 TiN source adapter, assy |
| 0040-55456 | BELLJAR, 21 OD 300MM PC XT/XTE |
| 0021-04258 | PLATE, RETAINER ALUMINUM |
| 0021-07745 | SCRCAP SKT HD 8-32X5/8"L TORX SKT NITRONIC 60 |
| 0021-07747 | SCRW,CAPTIVE,RF FT,1/4"-20 TORX HD,VCTR IMP,300MM |
| 3690-01085 | SCRCAP SKT HD 6-32 X 3/8L HEX SKT SST |
| 3690-01914 | SCRCAP SKT HD 8-32 X 1/2L HEX SKT SST SLVR PLT (Sliver coated) |
| 0020-26583 | 6" Shutter Disk |
| 0020-26589 | 150mm PCII shield |
| 0020-24018 | Pin Antenna |
| 0020-24706 | cover ring |
| 0020-21893 | Lower Shield |
| 0020-26399 | 200mm Lower Shield(Blasted/Arc spray low profile/Arc spray high profile) |
| 0020-26288 | 200mm Lower Shield (screw hole 4.1mm NO b-blasted type with 8 point height QC data) |
| 0020-29431 | CLAMP RING, 8 SNNF, SST, E/E 2.54MM |
| 0020-03636 | Vespel screw |
| 0021-20788 | SHIELD, 8", 101% AL COVERAGE, 200MM |
| 0200-02420 | 200mm Dep ring |
| 0021-15555 | 200mm dep Ring |
| 0020-24804 | 200mm ESC Cover Ring |
| 0020-27205 | 200mm hot al chamber clamp ring |
| 0200-36638 | SHIELD, 8" 200MM/200 mm quartz Blade |
| 0021-16783 | Cover Ring / COVER RING, NARROW POCKET, 300MM SIP CU, REV 2.0 |
| 0021-21444 | 200mm SiP Upper Shield |
| 0021-18436 | 200mm Cover ring |
| 0020-25730 | 200mm Upper Shield |
| 0021-26609 | Shutter Disc/SHUTTER DISK, A101, TTN, CENTER PIN, BLUE, 300MM |
| 0021-20718 | PEDESTAL COVER LOWER 8”B101 REV 2.1 SST |
| 0021-20437 | DISK 8”B101 TI SHUTTER |
| 0020-29343 | SHIELD CLAMP，DARKSPACE .727”TALL VECTRA-IMP |
| 0040-21178 | PRECLEAN II BELL JAR SERIALIZED |
| 0040-20561 | PRECLEAN II BELL JAR SERIALIZED |
| 0200-00218 | COVER TOP QUARTZ 8" PCII |
| 0200-00221 | INSULATOR, PINLESS 8" SNNF, PRECLEAN II |
| 0020-24914 | COVER RING |
| 0010-21717 | ASSY SHIELD 6" ADV-101 TIN VECTRA-IMP (no coil) |
| 0020-06265 | 200mm Shield |
| 0021-14847 | 200mm Shield |
| 0021-21589 | 200mm Shield |
| 0020-26254 | Insulator |
| 0020-23579 | 300mm Encore Lower Shield with Arc Spray |
| 0020-29525 | cup outer |
| 0021-06336 | Shutter disc |
| 0200-02812 | Dep ring |
| 0020-29345 | 150mm Imp Vectra lower shield |
| 0020-02537 | Lower SIP SHIELD 6" |
附件檔案下載：
※如有需求，請洽公司人員詢問。